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Neutral Atom Lithography Publications

[1] D. Mescehede and H. Metcalf. Atomic Nanofabrication: Atomic Deposition and Lithography by Laser and Magnetic Forces. J. Phys. D: Appl. Phys. 36, R17 (2003).

[2] Neutral Atom Lithography Using a Bright Metastable Helium Beam - Poster presented at APS DAMOP 2006

[3] Neutral Atom Lithography Using a Bright Metastable Helium Beam - Poster presented at APS DAMOP 2008 and ICAP 2008

[4] Neutral Atom Lithography Using a Bright Metastable Helium Beam - Poster presented at APS DAMOP 2009

[5] Atomic Nanofabrication of Periodic Structures - Presented at 2009 CLEO/QELS Conference: (Abstract)

[6] C. Allred, J. Reeves, C. Corder, and H. Metcalf. Atom Lithography with Metastable Helium. J. App. Phys. 107, 033116 (2010).

Copyright (2010) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The article appeared in J. Appl. Phys. and may be found here.

[7] Structures of ~100 nm Size Produced by Atom Lithography with Metastable He - Poster presented at APS DAMOP 2010 and APS March Meeting 2010